Acequip Digital（RS-485）MFC/MFM
A2-FCRRNCS/A2-FCRRVCS/A2-FMRRNS/A2-FMRRVS
Product Description
This high-performance digital mass flow controller (MFC) with RS-485 communication is engineered to deliver exceptional precision, flexibility, and reliability in gas flow control applications. Featuring an advanced high-accuracy flow sensor, this MFC provides a precision range of ±1% of the setpoint (S.P.). Combining advanced technology with a robust design, this MFC is perfectly suited for applications in semiconductor manufacturing, chemical processing, and research, meeting the highest standards of performance and reliability.
Features:
Available flow range from 2 sccm (milliliters per minute) to 50 slpm (liters per minute).
Two types of control power supply: Dual power supply (±15VDC) or wide voltage range (+12VDC to +32VDC).
RS-485 digital communication interface, supporting both ASCII communication protocol and Modbus RTU protocol.
Analog input/output signal: 0 to 5 VDC.
Leak rate: Max 1x10^-9 Pa·m³/sec (He).
Configurable Options:
Multi-gas / multi-range configuration available.
Configurable multifunctional LCD local display control interface.
Specifications
Model | A2 |
Full Scale Range(N2 eqv) | 2 SCCM - 50SLM |
Response Time | ≤ 0.8 sec |
Accuracy | ≥25% F.S. ：≤±1% S.P. |
＜25% F.S. ：≤± 0.25% F.S. |
Linearity | ≤ ±0.5% of Full Scale |
Repeatability | ≤ ±0.1% of Full Scale |
Operating Differential Pressure | 2 SCCM – 10 SCCM：0.05 - 0.28 MPa |
6 SLM – 50 SLM：0.1 – 0.28 MPa |
Leak Integrity | Viton Seal: Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal: Max 1x10-11Pa.m3/sec (He) |
Control Range | Single Gas： 2-100% of Full Scale |
Multi Gas Multi Range：5-100% of Full Scale |
Max operating Pressure | 0.48 MPa |
Proof Pressure | 1 MPa |
Operation Temperature | 5-45 Deg C |
Mechanical
Control Valve | Normally closed/Normally Open Solenoid Valve |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible |
Seal | Viton Seal/Metal Seal/All Metal Seal |
Orientation | Free |
Wetted Material | Viton Seal：SUS316L, Viton, PTFE, Electromagnetic stainless steel |
Metal Seal：SUS316L, Ni, PTFE, Electromagnetic stainless steel |
All Metal Seal：SUS316L, Ni, Electromagnetic stainless steel |
Surface Finish | Viton Seal | ≤5RA |
Metal Seal | TC，≤5RA |
Weight | appr. 0.8 KG |
Electrical
Analog Input Voltage | DC 0-5V |
Analog Output Voltage | DC 0-5V |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA |
+12VDC-+32VDC | +12VDC 500mA - +32VDC 180mA |
Power Consumption | ±15VDC | 3.1W |
+12VDC- +32VDC | 6W |
Analog Connector | 9Pin D-sub Male |
RS-485 Connector | 6-Pin RJ-11 * 2 |
Acequip Digital（RS-485）Mass Flow Controller
A2-FCRRNCS-E4S/A2-FCRRVCS-E4S/A2-FMRRNS-E4S/A2-FMRRVS-E4S (1/4”LOK)
Acequip Digital（RS-485）Mass Flow Controller
A2-FCRRNCS-E4V/A2-FCRRVCS-E4V/A2-FMRRNS-E4V/A2-FMRRVS-E4V(1/4”M.VCR)