Acequip Micro Flow（2SCCM）MFC/MFM
A2-FCRRNCS/A2-FCRRVCS/A2-FMRRNS/A2-FMRRVS
Product Description
This advanced micro-flow mass flow controller is designed for high-performance applications with a minimum full-scale range of 2 SCCM (N2 equivalent), delivering precise and stable control at the lowest full-scale flow rate of 1%. It is particularly well-suited for low-range applications, such as analytical instruments and other precise measurement tools.
Key Features:
Minimum Full-Scale Flow Rate: 2 sccm (standard cubic centimeters per minute).
Dual Power Supply Options: Compatible with dual power supply (±15VDC) or wide voltage range (+12~+32VDC).
RS-485 Digital Communication Interface: Supports both ASCII and Modbus RTU communication protocols.
Analog Input/Output Signal: 0～5VDC.
Leak Rate:
Rubber Seal: Maximum 1x10^-9 Pa·m³/sec (He).
Metal Seal: Maximum 1x10^-11 Pa·m³/sec (He).
Configurable Options：
Multi-Gas/Multi-Range Functionality: Configurable for multiple gases and flow ranges.
Seal Options: Available in metal seal or full metal seal models.
Model Customization: Supports ordering in both MFC (Mass Flow Controller) and MFM (Mass Flow Meter) configurations.
Specifications
Model | A2 |
Full Scale Range(N2 eqv) | 2 SCCM – 10 SCCM |
Response Time | ≤ 0.8 sec |
Accuracy | ≥25% F.S. ：≤±1% S.P. |
＜25% F.S. ：≤± 0.25% F.S. |
Linearity | ≤±0.5% of Full Scale |
Repeatability | ≤±0.1% of Full Scale |
Operating Differential Pressure | 2 SCCM – 10 SCCM：0.05 - 0.28 MPa |
Leak Integrity | Viton Seal：Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal：Max 1x10-11Pa.m3/sec (He) |
Control Range | Single Gas： 2-100% of Full Scale |
Multi Gas Multi Range：5-100% of Full Scale |
Max operating Pressure | 0.48 MPa |
Proof Pressure | 1 MPa |
Operation Temperature | 5-45 Deg C |
Mechanical
Control Valve | Normally closed/Normally Open Solenoid Valve |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible |
Seal | Viton Seal/Metal Seal/All Metal Seal |
Orientation | Free |
Wetted Material | Viton Seal：SUS316L, Viton, PTFE, Electromagnetic stainless steel |
Metal Seal：SUS316L, Ni, PTFE, Electromagnetic stainless steel |
All Metal Seal：SUS316L, Ni, Electromagnetic stainless steel |
Surface Finish | ≤5RA |
Weight | appr. 0.8 KG |
Electrical
Analog Input Voltage | DC 0-5V |
Analog Output Voltage | DC 0-5V |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA |
+12VDC-+32VDC | +12VDC 500mA - +32VDC 180mA |
Power Consumption | ±15VDC | 3.1W |
+12VDC- +32VDC | 6W |
Analog Connector | 9Pin D-sub Male |
RS-485 Connector | 6-Pin RJ-11 * 2 |
Acequip Micro Flow（2SCCM）MFC/MFM
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Acequip Micro Flow（2SCCM）MFC/MFM
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