C2 Digital (100-300 SLM) MFC/MFM
C2-FCRANCV/C2-FCRAVCV/C2-FCRRNCS/C2-FCRRVCS
Product Description
The Acequip C2 high-flow mass flow controller is a high-performance device designed for full scale in the range of 100 to 300 SLM (standard liters per minute). With fast response time, excellent flow control precision, and high reliability, this product is ideal for applications in gas analysis, semiconductor manufacturing, and laboratory research that require precise flow measurement and control.
Features:
·Flow Range: Suitable for a wide flow range from 100 SLM to 300 SLM, meeting the needs of various industrial applications
·Power Supply Options: Two types of power inputs are supported: dual power supply (±15VDC) or wide voltage input (+12V ~ +32VDC)
·Digital Communication Interface: Equipped with RS-485 communication interface, compatible with both ASCII and Modbus RTU protocols for easy integration with automation systems
·Analog Signal I/O: Supports 0-5VDC voltage or 4-20mA current signal input/output
·Sealing Performance: Rubber seal leakage rate up to 1×10⁻⁹ Pa.m³/sec (He); Metal seal leakage rate up to 1×10⁻¹¹ Pa.m³/sec (He)
Configurable Options:
Available in metal seal and full-metal seal models to accommodate different gas flow control requirements
MFC (Mass Flow Controller) and MFM (Mass Flow Meter) models are available for selection, catering to various precision measurement needs
Specifications
Model | C2 |
Full Scale Range(N2 eqv) | 100 SLM– 300 SLM |
Response Time | ≤ 2 sec |
Accuracy | ≤± 2% F.S. |
Linearity | ≤ ±1% of Full Scale |
Repeatability | ≤ ±0.2% of Full Scale |
Operating Differential Pressure | 100SLM-150SLM: 0.15Mpa – 0.28Mpa |
150SLM-200SLM: 0.18Mpa – 0.30Mpa |
200SLM-300SLM: 0.21Mpa – 0.30Mpa |
Leak Integrity | Viton Seal: Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal: Max 1x10-11Pa.m3/sec (He) |
Control Range | 2-100% of Full Scale |
Max operating Pressure | 0.48 MPa |
Proof Pressure | 1 MPa |
Operation Temperature | 5-45 Deg C |
Mechanical
Control Valve | Normally closed/Normally Open Solenoid Valve |
Fitting | 3/8"VCR or 1/2"Swagelok Compatible |
Seal | Viton Seal/Metal Seal/All Metal Seal |
Orientation | Free |
Wetted Material | Viton Seal：SUS316L, Viton, PTFE, Electromagnetic stainless steel |
Metal Seal：SUS316L, Ni, PTFE, Electromagnetic stainless steel |
All Metal Seal：SUS316L, Ni, Electromagnetic stainless steel |
Surface Finish | Viton Seal | ≤5RA |
Metal Seal | TC，≤5RA |
Weight | appr. 2 KG |
Electrical
Analog Input Voltage | DC 0-5V / 4-20mA |
Analog Output Voltage | DC 0-5V / 4-20mA |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA |
+12VDC-+32VDC | +12VDC 500mA - +32VDC 180mA |
Power Consumption | ±15VDC | 3.1W |
+12VDC- +32VDC | 6W |
Analog Connector | 9Pin D-sub Male |
RS-485 Connector | 6-Pin RJ-11 * 2 |
C2 Digital (100-300 SLM) MFC/MFM
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