Acequip Metal Seal（RS-485）MFC/MFM
A2-FCMRNCS/A2-FCMRVCS/A2-FMMRNS/A2-FMMRVS
Product Description
A high-performance metal-sealed digital (RS-485) mass flow controller, featuring a high-precision flow sensor that ensures an accuracy range of ±1% of set point (S.P.). With a metal-sealed design, it offers excellent corrosion resistance.
Features
Flow range available from 2 sccm (milliliters per minute) to 50 slpm (liters per minute).
Two types of control power supplies: Dual power supply (±15VDC) or wide voltage input (+12VDC to +32VDC).
RS-485 digital communication interface, supporting both ASCII communication protocol and Modbus RTU protocol.
Metal seal with Teflon valve seat.
Leak rate: Max 1x10^-11 Pa·m³/sec (He).
Configurable Options
Multi-gas / multi-range configuration available.
Configurable multifunctional LCD local display control interface.
Specifications
Model | A2 |
Full Scale Range(N2 eqv) | 2 SCCM |
Response Time | ≤ 0.8 sec |
Accuracy | ≥25% F.S. ：≤±1% S.P. |
＜25% F.S. ：≤± 0.25% F.S. |
Linearity | ≤ ±0.5% of Full Scale |
Repeatability | ±0.1% of Full Scale |
Operating Differential Pressure | 2 SCCM – 10 SCCM：0.05 - 0.28 MPa |
6 SLM – 50 SLM：0.1 – 0.28 MPa |
Leak Integrity | Max 1x10-11Pa.m3/sec (He) |
Control Range | Single Gas： 2-100% of Full Scale |
Multi Gas Multi Range：5-100% of Full Scale |
Max operating Pressure | 0.48 MPa |
Proof Pressure | 1 MPa |
Operation Temperature | 5-45 Deg C |
Mechanical
Control Valve | Normally closed/Normally Open Solenoid Valve |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible |
Seal | All Metal Seal |
Orientation | Free |
Wetted Material | SUS316L, Ni, PTFE, Electromagnetic stainless steel |
Surface Finish | TC，≤5RA |
Weight | appr. 1 KG |
Electrical
Analog Input Voltage | DC 0-5V |
Analog Output Voltage | DC 0-5V |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA |
+12VDC-+32VDC | +12VDC 500mA - +32VDC 180mA |
Power Consumption | ±15VDC | 3.1W |
+12VDC- +32VDC | 6W |
Analog Connector | 9Pin D-sub Male |
RS-485 Connector | 6-Pin RJ-11 * 2 |
Acequip Metal Seal（RS-485）MFC/MFM
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Acequip Metal Seal（RS-485）MFC/MFM
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