Acequip All-Metal Seal（RS-485）MFC/MFM
A2-FCTRNCS/A2-FCTRVCS/A2-FMTRNS/A2-FMTRVS
Product Description
This i a high-performance, all-metal sealed, digital Mass Flow Controller (RS-485), utilizing a high-precision flow sensor to ensure accuracy within ±1% of the setpoint. The all-metal sealed fluid path offers exceptional corrosion resistance.
Features
Flow Range: Wide flow range from 2 sccm (milliliters per minute) to 50 slpm (liters per minute), covering a broad spectrum of industrial applications.
Power Supply Options: Flexible power options with dual power supply (±15VDC) or wide voltage input (+12VDC to +32VDC) to meet varying system requirements.
Communication Interface: Equipped with RS-485 digital communication, compatible with both ASCII and Modbus RTU protocols, ensuring seamless integration into existing systems.
All-Metal Sealing: The fluid path is fully sealed with an all-metal design and features electropolished surface treatment for enhanced durability and corrosion resistance.
Leak Rate: Ultra-low leak rate of Max 1x10^-11 Pa·m³/sec (He), ensuring the highest level of performance and reliability.
Configurable Options
Multi-Gas / Multi-Range: Configurable for multiple gases and flow ranges, offering versatility for a variety of applications.
Local Control Interface: Customizable multifunctional LCD display for local monitoring and control, providing ease of use and real-time data feedback.
Specifications
Model | A2 |
Full Scale Range(N2 eqv) | 2 SCCM |
Response Time | ≤ 0.8 sec |
Accuracy | ≥25% F.S. ：≤±1% S.P. |
＜25% F.S. ：≤± 0.25% F.S. |
Linearity | ≤ ±0.5% of Full Scale |
Repeatability | ±0.1% of Full Scale |
Operating Differential Pressure | 2 SCCM – 10 SCCM：0.05 - 0.28 MPa |
6 SLM – 50 SLM：0.1 – 0.28 MPa |
Leak Integrity | Max 1x10-11Pa.m3/sec (He) |
Control Range | Single Gas： 2-100% of Full Scale |
Multi Gas Multi Range：5-100% of Full Scale |
Max operating Pressure | 0.48 MPa |
Proof Pressure | 1 MPa |
Operation Temperature | 5-45 Deg C |
Mechanical
Control Valve | Normally closed/Normally Open Solenoid Valve |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible |
Seal | All Metal Seal |
Orientation | Free |
Wetted Material | SUS316L, Ni, Electromagnetic stainless steel |
Surface Finish | TC，≤5RA |
Weight | appr. 1 KG |
Electrical
Analog Input Voltage | DC 0-5V |
Analog Output Voltage | DC 0-5V |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA |
+12VDC-+32VDC | +12VDC 500mA - +32VDC 180mA |
Power Consumption | ±15VDC | 3.1W |
+12VDC- +32VDC | 6W |
Analog Connector | 9Pin D-sub Male |
RS-485 Connector | 6-Pin RJ-11 * 2 |
Acequip All-Metal Seal（RS-485）MFC/MFM
A2-FCTRNCS-E4S/A2-FCTRVCS-E4S/A2-FMTRNS-E4S/A2-FMTRVS-E4S (1/4”LOK)
Acequip All-Metal Seal（RS-485）MFC/MFM
A2-FCTRNCS-E4V/A2-FCTRVCS-E4V/A2-FMTRNS-E4V/A2-FMTRVS-E4V(1/4”M.VCR)
Acequip All-Metal Seal（RS-485）MFC/MFM
A2-FCTRNCS-IGW/A2-FCTRVCS-IGW/A2-FMTRNS-IGW/A2-FMTRVS-IGW (IGS 1.125"W-SEAL)
