This Explosion-Proof Mass Flow Controller is engineered to provide both intrinsic safety and high-precision gas flow control in explosive and hazardous environments. Certified with EX explosion-proof and IP65 ingress protection, this device ensures reliable, accurate flow regulation in even the most demanding industrial applications.
Wide Flow Range: Flow range from 2 sccm to 50 slm, offering precise control for a wide range of gases in explosive environments.
Explosion-Proof Certification: Ex ib IIC T4 Gb certification ensures safe operation in environments with explosive gases and vapors, fully compliant with international safety standards.
Precision Gas Control: High-accuracy flow measurement and control to maintain consistent and optimal performance in critical processes.
IP65 Protection: IP65 rating ensures complete protection against dust and water ingress, making it ideal for harsh industrial environments, including outdoor and washdown areas.
Communication Protocols: Supports ASCII and Modbus RTU protocols for seamless integration into existing automation systems, ensuring real-time monitoring and control.
Low Leak Rate: Choose between rubber seals (max leak rate: 1x10^-9 Pa·m³/sec (He)) or metal seals (max leak rate: 1x10^-11 Pa·m³/sec (He)) for minimal leakage and enhanced operational safety.
Specifications
Model | F1 |
Full Scale Range(N2 eqv) | 2 SCCM – 50 SLM |
Response Time | ≤ 0.8 sec |
Accuracy | ≥25% F.S. ：≤±1% S.P. |
＜25% F.S. ：≤± 0.25% F.S. |
Linearity | ≤±0.5% of Full Scale（30SLM以上≤1%） |
Repeatability | ≤±0.1% of Full Scale |
Operating Differential Pressure | 2 SCCM – 5 SLM：0.05 - 0.28 MPa |
6 SLM – 50 SLM：0.1 – 0.28 MPa |
Leak Integrity | Viton Seal：Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal：Max 1x10-11Pa.m3/sec (He) |
Control Range | Single Gas： 2-100% of Full Scale |
Multi Gas Multi Range：5-100% of Full Scale |
Max operating Pressure | 0.48 MPa |
Proof Pressure | 1 MPa |
Operation Temperature | 5-45 Deg C |
Control Valve | Normally closed/Normally Open Solenoid Valve |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible |
Seal | Viton Seal/Metal Seal/All Metal Seal |
Orientation | Free |
Wetted Material | Viton Seal：SUS316L, Viton, PTFE, Electromagnetic stainless steel |
Metal Seal：SUS316L, Ni, PTFE, Electromagnetic stainless steel |
All Metal Seal：SUS316L, Ni, Electromagnetic stainless steel |
Surface Finish | ≤5RA |
Weight | appr. 0.8 KG |
Mechanical
Electrical
Analog Input Voltage | DC 0-5V / 4-20mA |
Analog Output Voltage | DC 0-5V / 4-20mA |
Power Supply | +12VDC 500mA ～+24VDC 250mA |
Power Consumption | +12VDC- +24VDC | 6W |
Analog Connector |
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RS-485 Connector | RS-485 |