A2 High-prssure (10SCCM-30SLM) MFC
A2-FCPRNCS/A2-FCPRVCS/A2-FMPRNS/A2-FMPRVS
Product Description
This high-pressure gas mass flow controller is designed for demanding high-pressure applications, with a proof pressure of 10 MPa, ensuring reliability and safety under extreme conditions. Its fast response time and precise flow control make it ideal for high-pressure gas flow regulation, widely used in chemical engineering, semiconductor manufacturing, laboratory research, and other industries.
Features:
Maximum proof pressure 10 MPa
Fast response time for precise flow control
Available with rubber or metal seals
Suitable for various high-pressure gas flow control applications
Reliable and durable, designed for harsh environments
Speciications
Model | A2 |
Full Scale Range(N2 eqv) | 10 SCCM – 30 SLM |
Response Time | ≤ 1 sec |
Accuracy | ≥25% F.S. ：≤±1% S.P. |
＜25% F.S. ：≤± 0.25% F.S. |
Linearity | ≤ ±0.5% of Full Scale |
Repeatability | ≤ ±0.1% of Full Scale |
Operating Differential Pressure | 0.2 – 0.8 MPa |
Leak Integrity | Viton Seal: Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal: Max 1x10-11Pa.m3/sec (He) |
Control Range | Single Gas： 2-100% of Full Scale |
Multi Gas Multi Range：5-100% of Full Scale |
Proof Pressure | 10 MPa |
Operation Temperature | 5-45 Deg C |
Mechanical
Control Valve | Normally closed Solenoid Valve |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible |
Seal | Viton Seal/Metal Seal/All Metal Seal |
Orientation | Free |
Wetted Material | Viton Seal：SUS316L, Viton, PTFE, Electromagnetic stainless steel |
Metal Seal：SUS316L, Ni, PTFE, Electromagnetic stainless steel |
All Metal Seal：SUS316L, Ni, Electromagnetic stainless steel |
Surface Finish | Viton Seal | ≤5RA |
Metal Seal | TC，≤5RA |
Weight | appr. 0.8 KG |
Electrical
Analog Input Voltage | DC 0-5V |
Analog Output Voltage | DC 0-5V |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA |
+12VDC-+32VDC | +12VDC 500mA - +32VDC 180mA |
Power Consumption | ±15VDC | 3.1W |
+12VDC- +32VDC | 6W |
Analog Connector | 9Pin D-sub Male |
RS-485 Connector | 6-Pin RJ-11 * 2 |
A2 High-prssure (10SCCM-30SLM) MFC
A2-FCPRNCS-E4S/A2-FCPRVCS-E4S/A2-FMPRNS-E4S/A2-FMPRVS-E4S
A2 High-prssure (10SCCM-30SLM) MFC
A2-FCPRNCS-E4V/A2-FCPRVCS-E4V/A2-FMPRNS-E4V/A2-FMPRVS-E4V