Acequip Digital (EtherCAT) MFC/MFM A2-FCRECCS/A2-FCMECCS/A2-FCTECCS
Product Description
The Acequip EtherCAT Mass Flow Controller is a high-performance digital flow control solution designed for precise and reliable gas flow regulation in cutting-edge industrial applications. Compliant with SEMI standards, it utilizes a high-accuracy flow sensor to ensure an accuracy range of ±1% S.P. (set point). EtherCAT communication enables ultra-fast, real-time control and data exchange, making it ideal for high-tech industries requiring high precision and high repeatability, such as semiconductor manufacturing, laboratory automation, and advanced material research.
Key Features
Flow Range: From 2 SCCM (milliliters per minute) to 50 SLM (standard liters per minute), suitable for a wide range of applications.
Metal Sealing Option: Provides superior leak-tight performance, with a leak rate of Max 1x10^-11 Pa·m³/sec (He), ensuring ultra-high purity and reliability.
EtherCAT Communication: Ensures fast, deterministic communication for seamless integration with other devices in automated systems.
High Precision and Repeatability: Achieves ±1% S.P. (set point) accuracy, ensuring consistent and repeatable performance for critical applications.
Connection Type Options: Available with IGS connectors for enhanced compatibility and integration.
Specifications
Model | A2 |
Full Scale Range(N2 eqv) | 2 SCCM – 50 SLM |
Response Time | ≤ 0.8 sec |
Accuracy | ≥25% F.S. ：≤±1% S.P. |
＜25% F.S. ：≤± 0.25% F.S. |
Linearity | ≤±0.5% of Full Scale（30SLM以上≤1%） |
Repeatability | ≤±0.1% of Full Scale |
Operating Differential Pressure | 2 SCCM – 5 SLM：0.05 - 0.28 MPa |
6 SLM – 50 SLM：0.1 – 0.28 MPa |
Leak Integrity | Viton Seal：Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal：Max 1x10-11Pa.m3/sec (He) |
Control Range | Single Gas： 2-100% of Full Scale |
Multi Gas Multi Range：5-100% of Full Scale |
Max operating Pressure | 0.48 MPa |
Proof Pressure | 1 MPa |
Operation Temperature | 5-45 Deg C |
Mechanical
Control Valve | Normally closed/Normally Open Solenoid Valve |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible |
Seal | Viton Seal/Metal Seal/All Metal Seal |
Orientation | Free |
Wetted Material | Viton Seal：SUS316L, Viton, PTFE, Electromagnetic stainless steel |
Metal Seal：SUS316L, Ni, PTFE, Electromagnetic stainless steel |
All Metal Seal：SUS316L, Ni, Electromagnetic stainless steel |
Surface Finish | ≤5RA |
Weight | appr. 0.8 KG |
Electrical
Communication | EtherCAT |
Power Supply | +12VDC-+32VDC | +12VDC 500mA - +32VDC 180mA |
Power Consumption | +12VDC- +32VDC | 6W |
RS-485 Connector | M8 5Pin Male |
RJ45*2 |
Acequip Digital (EtherCAT) MFC/MFM
A2-FCREWCS-E4V/A2-FCMEWCS-E4V/A2-FCTEWCS-E4V/A2-FCRECCS-E4V/A2-FCMECCS-E4V/A2-FCTECCS-E4V
Acequip Digital (EtherCAT) MFC/MFM
A2-FCRECCS-IGW/A2-FCMECCS-IGW/A2-FCTECCS-IGW (IGS 1.125"W-SEAL)
