M1 Ultra-compact(3SCCM-5SLM)Mass Flow Controller

High Temperature(80°C-120°C)Mass Flow Controller

A2 Digital(EtherCAT)Mass Flow Controller

1/8"NPT 1000 Series On/Off Solenoid Valve

1/4”2000 Series On/Off Solenoid Valve

5000 Series Solenoid Proportional Valve

6000 Series Solenoid Proportional Valve

7000 Series Solenoid Proportional Valve

7100 Series Solenoid Proportional Valve

VSP-1A Proportional Valve Driver

MFCSP-D1 Read-out unit